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playground:sputter [2009/03/19 14:47]
132.235.40.233 Remove bad comma
playground:sputter [2017/03/20 09:51] (current)
jacobs
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 ** Cs Sputter Source Startup Procedure ** ** Cs Sputter Source Startup Procedure **
  
-Last modified on 12/06/2006 
-General Considerations 
  
-Cs Sputter Source Cutaway Diagram 
-Cs Sputter Source High Voltage Supplies 
  
-    ​The proper target ​ must be installed. +** General Considerations ** 
-    ​The base pressure of 2 x 10E-6 torr or less.+
  
-General Preparations +  * Review these illustrations:​ 
- +    * [[Cs_labeled|Cs Sputter Source Labeled Cutaway Diagram]] ​ 
-   1. Ensure that desired beam target is loaded. +    * [[cutaway|Cs Sputter Source Cutaway Diagram]] 
-   2. Set buncher tubes to correct configuration for desired beam species. +    * [[hvsupplies|Cs Sputter Source High Voltage Supplies]] 
-   3. Check vacuum on LE extension.�  +  * The proper target ​ must be installed (See Devon.) 
-   4. Temperature gauge on cryopump should ​be well below the green mark +  * The base pressure of 2 × 10<​sup>​-6</​sup>​ torr or less
-   5. Open source gate valve by pressing either button on gate valve control at source gate+   
-   ​6. Remove grounding hook from power supply platform and hang on gate before closing.� ​ +** General Preparations **
-   7. Close gate to source area.  Orange lights on Glassman supplies should come on at gate closing. ​ +
-   8. Use long plexi rod to turn on top 2 Glassmans (target and extractor) by pushing green buttons.+
  
 +  - Ensure that desired beam target is loaded.
 +  - Set buncher tubes to correct configuration for desired beam species.
 +  - Check vacuum on LE extension, temperature gauge on cryopump should be at minimum value. ​
 +  - Open source gate valve by pressing either button on gate valve control at source gate.
 +  - Set cesium reservoir controller temperature set point (green numbers): ​ 123C for ones of uAs, 130C for tens of uAs.
 +  - Remove grounding hook from power supply platform and hang on gate before closing. ​
 +  - Close both gates to source area.  Orange lights on Glassman supplies should come on at gate closing. ​ (If not, check other gate on the other side of the accelerator;​ both must be secured.) ​
 +  - Press the doorbell button on top the Pelletron AC Power Center. ​ The Extractor and Target Glassman supplies should indicate Voltage Control with red lights.
 ** Startup and Normal Operation (in control room) ** ** Startup and Normal Operation (in control room) **
  
-   ​1. ​Turn on and set the Del main extractor supply to the desired voltage for the particular buncher setting. +  - Turn on and set the **Del main extractor** supply to the desired voltage for the particular buncher setting. 
-   2. Set the Glassman extractor power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliampres" light is NOT lit. High current indicates that the source needs serviced. +  - Turn up the **ionizer** heater. ​  ​The ionizer operates at 21-22 amps Keep in mind that the current will fall slightly as the ionizer gets warmer. ​ Keep adjusting the current until the ionizer is stable at 21-22 A. It should take about 1 minute to reach 21 A from the standby value of 10 A. 
-   3. Set the Glassman target power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliampres" light is NOT lit. High current indicates that the source needs serviced+  - Turn up the Cesium **feed tube** heater to 0.450 amperes. ​  
-   4. Slowly turn up the ionizer heater in small steps.  ​( This source has a HELICAL Ionizer). ​  The helical ionizer operates at 21 amperes. It should take about ten (10) minutes to reach 21 from the standby value of 10 A. Keep in mind that the amperage ​will fall slightly as the ionizer gets warmer.� Keep adjusting until the ionizer is stable ​at 21 A+  - Set the cesium **reservoir** heater current to **0.315** Amps. This is an approximate value above the needed power level. ​  
-   5. Turn up the Cs feed tube heater to 0.450 amperes. ​  +  - Set the Glassman ​**extractor** power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliamperes" light is NOT lit. High current indicates that the source needs to be serviced. 
-   ​6. ​Set the cesium reservoir heater ​to 0.380.� This should be enough to give ones of microamps beam for p and d.    A setting of about 0.420 should produce tens of microamps.� Cs vaporization starts at a temperature of ~80 degree Celsius. ​  The maximum reservoir temperature should not exceed 100 degrees Celsius.� The reservoir current should not exceed 0.500 +  ​- ​Set the Glassman ​**target** power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "​control ​milliamperes" light is NOT lit. High current indicates that the source needs to be serviced. ​ A newly installed pellet may cause instability for the first hour or so, but will become ​stable. 
-   7. Tune the beam with the inflection magnet, source lens (about ​1KV), lens A, and 2Y steerer. +  ​Set the Glassman **lens** power supply ​to 1.5 kV
-   8. Monitor the target and extractor currents.� Target ​current should ​operate at around 2.5 milliamps, no more than 5 mA.+  - **Tune the beam with the inflection magnet, source lens (usually ​about 1.5 kV), einzel ​lens A, and 2Y steerer.**  The 2X steerer should be neutral (5.00 on dial) as X steering is be done by the inflection magnet at this stage. 
 +  - Monitor the target and extractor currents: target ​current should ​be around 2.5 milliamps, ​and no more than 5 mA.  If target current gets too high, reduce the cesium reservoir setting.
  
 ** Out-gassing the source after cleaning ** ** Out-gassing the source after cleaning **
  
-   ​1. ​The source gate valve should be closed for this operation. +  - The source gate valve should be closed for this operation. 
-   2. Wait for normal vacuum. ​ Normal is when the needle is in the blue mark on the gauge above the TV in the control room. +  ​- ​Wait for normal vacuum. ​ Normal is when the needle is in the blue mark on the gauge above the TV in the control room. 
-   3. Set ionizer to 10A.� This will lead to a rise in the vacuum pressure. +  ​- ​Set ionizer to 10A. This will lead to a rise in the vacuum pressure. 
-   4. Wait for vacuum to fall back to the blue mark on the gauge +  ​- ​Wait for vacuum to fall back to the blue mark on the gauge 
-   5. Raise the ionizer by an additional� 2-3 A and wait for the vacuum to fall back into the blue range. +  ​- ​Raise the ionizer by an additional 2-3 A and wait for the vacuum to fall back into the blue range. 
-   6. Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range. +  ​- ​Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range, may take 8 hours
-   7. Open the source gate valve and carry out the Startup and Normal Operation.+  ​- ​Open the source gate valve and carry out the Startup and Normal Operation.
  
 ** Checklist for Target Pellet Change ** ** Checklist for Target Pellet Change **
- + 
 +  * [[sputter:​pellet|Sputter Source Target Pellet Change]]
  
 ** Shut Down Procedure ** ** Shut Down Procedure **
  
-   1Turn down the reservoir heater ​power supply.  ​Off is about 0.070 A+  - **Cesium reservoir**:​ The reservoir has a temperature controller that turns the power on/off as needed for a constant temperature The controller is located next to the analog temperature meter on the source ​power platform.  ​The red numbers are the measured temperature,​ the green numbers are the set point temperature,​ there is a small red light that indicates when the controller is calling for power. ​ The reservoir current switches between ​0.150A and .315A as directed by the controller
-   2. Wait for the reservoir temperature to drop below 80 degrees.   +  - Wait until the reservoir controller'​s red power light is on and you can see about .315A reservoir current on the meter, run the reservoir current down on the digital meter. ​ Make sure that you see controller red light on with minimal amps of current. 
-   3. Turn down the feed tube power supply. +  - Wait for the reservoir temperature ​(red numbers on controller) ​to drop below** 85**° C.   
-   4. Wait for the feed tube temperature to drop below 80 degrees+  ​- ​Turn down the feed tube power supply. 
-   5. Wait for the Target Supply current to fall to less than 1 milliamp. +  ​- ​Wait for the feed tube temperature to drop below 80° C
-   6. Turn the ionizer current down to 10 amps. (The ionizer current should be left at 10 amps. This helps avoid the "​poisoning"​ of the ionizer.) +  ​- ​Wait for the Target Supply current to fall to less than 1 milliamp. 
-   7. Turn down target and extractor voltages to zero. +  ​- ​Turn the ionizer current down to 10 amps. (The ionizer current should be left at 10 amps. This helps avoid the "​poisoning"​ of the ionizer.) 
-   8. Turn off DEL high voltage supply. +  ​- ​Turn down target and extractor voltages to zero. 
-   9. Close sputter source vacuum gate valve. +  ​- ​Turn off DEL high voltage supply. 
- +  ​- ​Close sputter source vacuum gate valve.
-** Original Credits ** +
-  +
-Maintained by: +
-Thomas N. Massey +
-Office: Accelerator Lab 217 +
-Telephone: (740)593-0933 +
-E-Mail: MASSEY@OHIOU.EDU +
-Last modified on 12/06/2006+
  
  
playground/sputter.1237488422.txt.gz · Last modified: 2009/03/19 14:47 by 132.235.40.233