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Cs Sputter Source Startup Procedure
Last modified on 12/06/2006 General Considerations
Cs Sputter Source Cutaway Diagram Cs Sputter Source High Voltage Supplies
1. Ensure that desired beam target is loaded. 2. Set buncher tubes to correct configuration for desired beam species. 3. Check vacuum on LE extension.� 4. Temperature gauge on cryopump should be well below the green mark. 5. Open source gate valve by pressing either button on gate valve control at source gate. 6. Remove grounding hook from power supply platform and hang on gate before closing.� 7. Close gate to source area. Orange lights on Glassman supplies should come on at gate closing. 8. Use long plexi rod to turn on top 2 Glassmans (target and extractor) by pushing green buttons.
Startup and Normal Operation (in control room)
1. Turn on and set the Del main extractor supply to the desired voltage for the particular buncher setting. 2. Set the Glassman extractor power supply to 12.5 KV. Check to be sure the current is less than about 5 milliamps and the "control milliampres" light is NOT lit. High current indicates that the source needs serviced. 3. Set the Glassman target power supply to 6.5 kV. Check to be sure the current is less than about 5 milliamps and the "control milliampres" light is NOT lit. High current indicates that the source needs serviced. 4. Slowly turn up the ionizer heater in small steps. ( This source has a HELICAL Ionizer). The helical ionizer operates at 21 amperes. It should take about ten (10) minutes to reach 21 A from the standby value of 10 A. Keep in mind that the amperage will fall slightly as the ionizer gets warmer.� Keep adjusting until the ionizer is stable at 21 A. 5. Turn up the Cs feed tube heater to 0.450 amperes. 6. Set the cesium reservoir heater to 0.380.� This should be enough to give ones of microamps beam for p and d. A setting of about 0.420 should produce tens of microamps.� Cs vaporization starts at a temperature of ~80 degree Celsius. The maximum reservoir temperature should not exceed 100 degrees Celsius.� The reservoir current should not exceed 0.500 7. Tune the beam with the inflection magnet, source lens (about 1KV), lens A, and 2Y steerer. 8. Monitor the target and extractor currents.� Target current should operate at around 2.5 milliamps, no more than 5 mA.
Out-gassing the source after cleaning
1. The source gate valve should be closed for this operation. 2. Wait for normal vacuum. Normal is when the needle is in the blue mark on the gauge above the TV in the control room. 3. Set ionizer to 10A.� This will lead to a rise in the vacuum pressure. 4. Wait for vacuum to fall back to the blue mark on the gauge 5. Raise the ionizer by an additional� 2-3 A and wait for the vacuum to fall back into the blue range. 6. Repeat this process until the ionizer is at 21 A and the vacuum is in the blue range. 7. Open the source gate valve and carry out the Startup and Normal Operation.
Checklist for Target Pellet Change
Shut Down Procedure
1. Turn down the reservoir heater power supply. Off is about 0.070 A. 2. Wait for the reservoir temperature to drop below 80 degrees. 3. Turn down the feed tube power supply. 4. Wait for the feed tube temperature to drop below 80 degrees. 5. Wait for the Target Supply current to fall to less than 1 milliamp. 6. Turn the ionizer current down to 10 amps. (The ionizer current should be left at 10 amps.� This helps avoid the "poisoning" of the ionizer.) 7. Turn down target and extractor voltages to zero. 8. Turn off DEL high voltage supply. 9. Close sputter source vacuum gate valve.
Maintained by: Thomas N. Massey Office: Accelerator Lab 217 Telephone: (740)593-0933 E-Mail: MASSEY@OHIOU.EDU Last modified on 12/06/2006